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HRZ, High Performance Specialty Chiller, Fluorinated Coolant Type

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HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

  • Cooling capacities: 1kW, 2kW, 4kW, 8kW
  • Temperature range setting: -20 to 40°C, 20 to 90°C, -20 to 90°C
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
  • Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
  • Circulating fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
Configuration Options
  
 
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Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Cooling Capacity Configuration Status
Temperature Set Range Configuration Status
Option Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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