HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model requires a 60% ethylene glycol aqueous solution.

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model requires clear or deionized water as a coolant.

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. This model includes an energy-saving inverter compressor and inverter pump, achieving lower power consumption and requiring a lower average flow rate of facility water for refrigerant heat extraction. 10 kW of cooling capacity is available at 20°C coolant set point. Multiple coolant types can be selected for this model.