HRZ, High Performance Specialty Chiller, Double Inverter Type

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. This model includes an energy-saving inverter compressor and inverter pump, achieving lower power consumption and requiring a lower average flow rate of facility water for refrigerant heat extraction. 10 kW of cooling capacity is available at 20°C coolant set point. Multiple coolant types can be selected for this model.

• Cooling capacity: 10kW
• Temperature range setting:
  -20 to 90°C (fluorinated or ethylene glycol coolants)
  -10 to 60°C (clear or deionized water coolant)
• Temperature stability: ±0.1°C
• Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
• Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)